ASML: Senior Mechatronic Architect
ASML is the leading supplier of lithographic equipment in the world and as such one of the drivers behind the ever-continuing shrink in semiconductor manufacturing. This talk will give a brief overview of the world ASML is operating in and what the requirements are we are dealing with. From there it will go into where optics and optical design is used in the design and use of litho tools and the challenges that comes with. One specific sensor system developed in Wilton will be presented in more detail to get a sense to what extend optics are involved in the design process.